发明申请
US20130156973A1 METHOD OF PRODUCING MAGNESIUM FLUORIDE COATING, ANTIREFLECTION COATING, AND OPTICAL ELEMENT
审中-公开
氟化镁涂料生产方法,抗反射涂层和光学元件
- 专利标题: METHOD OF PRODUCING MAGNESIUM FLUORIDE COATING, ANTIREFLECTION COATING, AND OPTICAL ELEMENT
- 专利标题(中): 氟化镁涂料生产方法,抗反射涂层和光学元件
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申请号: US13770890申请日: 2013-02-19
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公开(公告)号: US20130156973A1公开(公告)日: 2013-06-20
- 发明人: Hiroyuki Tanaka , Motokazu Kobayashi , Teigo Sakakibara
- 申请人: Canon Kabushiki Kaisha
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2009-178332 20090730
- 主分类号: B05D5/06
- IPC分类号: B05D5/06
摘要:
A method of producing a magnesium fluoride coating includes a step of forming a coating by applying a solution containing a fluorine-containing organic magnesium compound represented by the following formula to a base and a step of heat-treating the coating while the coating is being irradiated with a beam of light with a wavelength of 246 nm or less: Mg(CF3—X—COO)2 (1) wherein X represents a single bond or one of —(CF2)n—, —(CH2)m—, and —CH2CF2— that may have a substituent, where n and m each represent an integer of 1 to 4. The temperature of the heat-treating step can be 250° C. or lower. The coating can be irradiated with a beam of light with a wavelength of 185 nm or less.
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