发明申请
- 专利标题： Vibrating Mirror Element
- 专利标题（中）： 振动镜元件
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申请号： US13820327申请日： 2011-08-19
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公开(公告)号： US20130163061A1公开(公告)日： 2013-06-27
- 发明人: Isaku Kanno , Naoki Inoue , Manabu Murayama
- 申请人： Isaku Kanno , Naoki Inoue , Manabu Murayama
- 申请人地址： JP Daito-shi ,Osaka
- 专利权人： Funai Electric Co., Ltd.
- 当前专利权人： Funai Electric Co., Ltd.
- 当前专利权人地址： JP Daito-shi ,Osaka
- 优先权： JP2010-199681 20100907
- 国际申请： PCT/JP2011/068782 WO 20110819
- 主分类号： G02B26/08
- IPC分类号： G02B26/08
摘要：
A vibrating mirror element including a detection electrode to detect driving and capable of being easily manufactured is provided. This vibrating mirror element includes a mirror portion and a driving portion driving the mirror portion, and the driving portion has a drive electrode to deform the driving portion by application of a voltage to drive the driving portion and a detection electrode to detect the amount of deformation of the driving portion, both arranged therein.
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