发明申请
- 专利标题： INERTIAL SENSOR AND METHOD OF MANUFACTURING THE SAME
- 专利标题（中）： 惯性传感器及其制造方法
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申请号： US13402373申请日： 2012-02-22
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公开(公告)号： US20130167640A1公开(公告)日： 2013-07-04
- 发明人: Seung Mo Lim , Sung Jun Lee , Sang Jin Kim , Yun Sung Kang , Kyo Yeol Lee
- 申请人： Seung Mo Lim , Sung Jun Lee , Sang Jin Kim , Yun Sung Kang , Kyo Yeol Lee
- 申请人地址： KR Gyunggi-do
- 专利权人： SAMSUNG ELECTRO-MECHANICS CO., LTD.
- 当前专利权人： SAMSUNG ELECTRO-MECHANICS CO., LTD.
- 当前专利权人地址： KR Gyunggi-do
- 优先权： KR1020110146076 20111229
- 主分类号： G01P15/00
- IPC分类号： G01P15/00 ; B32B38/10 ; B32B37/12
摘要：
Disclosed is an inertial sensor, including a membrane, a mass body provided underneath a central portion of the membrane, a post provided underneath a peripheral portion of the membrane, and a cap having a peripheral portion bonded to a lower surface of the post using low-temperature silicon direct bonding. A method of manufacturing the inertial sensor is also provided.
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