发明申请
- 专利标题: SEMICONDUCTOR MEMORY DEVICE AND METHOD OF FABRICATION AND OPERATION
- 专利标题(中): 半导体存储器件及其制造和操作方法
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申请号: US13340577申请日: 2011-12-29
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公开(公告)号: US20130170302A1公开(公告)日: 2013-07-04
- 发明人: Sung-Min Hong , Tae-Kyung Kim , Woosung Choi
- 申请人: Sung-Min Hong , Tae-Kyung Kim , Woosung Choi
- 主分类号: G11C16/04
- IPC分类号: G11C16/04 ; H01L21/336
摘要:
A non-volatile semiconductor memory device comprises a semiconductor substrate and a plurality of gate structures formed on a cell region of the semiconductor substrate. The plurality of gate structures include: a first select-gate structure and a second select-gate structure disposed on the cell region, the first select-gate structure and the second select-gate structure spaced apart from each other, and a plurality of cell gate structures disposed between the first select-gate structure and the second select-gate structure. At least one of the select-gate structures comprises plural select gates.
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