发明申请
US20130171570A1 DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE 审中-公开
绘图设备及制造方法

DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
摘要:
The present invention provides a drawing apparatus including a stage having a reference mark, and configured to hold a substrate and to be moved, a charged particle optical system, a first measuring device having an optical axis spaced apart from an axis of the charged particle optical system by a first distance and configured to measure a position of an alignment mark formed on the substrate, a second measuring device having an optical axis spaced apart from the axis of the charged particle optical system by a second distance and configured to measure a position of the reference mark, and a processor configured to obtain a baseline of the first measuring device based on positions of the reference mark respectively measured by the first measuring device and the second measuring device.
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