Invention Application
- Patent Title: DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Patent Title (中): 绘图设备及制造方法
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Application No.: US13721540Application Date: 2012-12-20
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Publication No.: US20130171570A1Publication Date: 2013-07-04
- Inventor: Koichi Sentoku , Hideki Ina , Wataru Yamaguchi , Nobushige Korenaga
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Priority: JP2011-289888 20111228
- Main IPC: G21K5/08
- IPC: G21K5/08 ; G03F7/20

Abstract:
The present invention provides a drawing apparatus including a stage having a reference mark, and configured to hold a substrate and to be moved, a charged particle optical system, a first measuring device having an optical axis spaced apart from an axis of the charged particle optical system by a first distance and configured to measure a position of an alignment mark formed on the substrate, a second measuring device having an optical axis spaced apart from the axis of the charged particle optical system by a second distance and configured to measure a position of the reference mark, and a processor configured to obtain a baseline of the first measuring device based on positions of the reference mark respectively measured by the first measuring device and the second measuring device.
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