发明申请
- 专利标题: DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- 专利标题(中): 绘图设备及制造方法
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申请号: US13721540申请日: 2012-12-20
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公开(公告)号: US20130171570A1公开(公告)日: 2013-07-04
- 发明人: Koichi Sentoku , Hideki Ina , Wataru Yamaguchi , Nobushige Korenaga
- 申请人: CANON KABUSHIKI KAISHA
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2011-289888 20111228
- 主分类号: G21K5/08
- IPC分类号: G21K5/08 ; G03F7/20
摘要:
The present invention provides a drawing apparatus including a stage having a reference mark, and configured to hold a substrate and to be moved, a charged particle optical system, a first measuring device having an optical axis spaced apart from an axis of the charged particle optical system by a first distance and configured to measure a position of an alignment mark formed on the substrate, a second measuring device having an optical axis spaced apart from the axis of the charged particle optical system by a second distance and configured to measure a position of the reference mark, and a processor configured to obtain a baseline of the first measuring device based on positions of the reference mark respectively measured by the first measuring device and the second measuring device.
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