发明申请
- 专利标题： REACTIVE-SPECIES SUPPLY DEVICE AND SURFACE TREATMENT APPARATUS
- 专利标题（中）： 反应物供应装置和表面处理装置
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申请号： US13807249申请日： 2011-06-30
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公开(公告)号： US20130174984A1公开(公告)日： 2013-07-11
- 发明人: Masaru Hori , Hiroyuki Kano , Tetsunori Kawasumi , Naofumi Yoshida , Akihiro Kawajiri , Toshimitsu Watanabe , Joji Isozumi
- 申请人： Masaru Hori , Hiroyuki Kano , Tetsunori Kawasumi , Naofumi Yoshida , Akihiro Kawajiri , Toshimitsu Watanabe , Joji Isozumi
- 申请人地址： JP Nagoya-shi, Aichi JP Chiryu-shi, Aichi
- 专利权人： NATIONAL UNIVERSITY CORPORATION NAGOYA UNIVERSITY,FUJI MACHINE MFG. CO., LTD.
- 当前专利权人： NATIONAL UNIVERSITY CORPORATION NAGOYA UNIVERSITY,FUJI MACHINE MFG. CO., LTD.
- 当前专利权人地址： JP Nagoya-shi, Aichi JP Chiryu-shi, Aichi
- 优先权： JP2010-149524 20100630
- 国际申请： PCT/JP2011/065007 WO 20110630
- 主分类号： H05H1/24
- IPC分类号： H05H1/24
摘要：
A reactive-species supply device is configured to supply a treatment gas to an electric discharge space, for thereby supplying at least a reactive species formed in a plasma, to an object. The reactive-species supply device includes (a) at least one pair of electrodes configured to form the electric discharge space and (b) an electrode protection device configured to protect the electrodes from the treatment gas. Also disclosed is a surface treatment apparatus that includes the reactive-species supply device.
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