发明申请
US20130175927A1 PLASMA TREATMENT APPARATUS USING LEAKAGE CURRENT TRANSFORMER
审中-公开
使用泄漏电流互感器的等离子体处理装置
- 专利标题: PLASMA TREATMENT APPARATUS USING LEAKAGE CURRENT TRANSFORMER
- 专利标题(中): 使用泄漏电流互感器的等离子体处理装置
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申请号: US13822745申请日: 2011-09-16
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公开(公告)号: US20130175927A1公开(公告)日: 2013-07-11
- 发明人: Je Won Lee
- 申请人: Je Won Lee
- 申请人地址: KR Gimhae-si, Gyeongsangnam-do
- 专利权人: INJE UNIVERSITY INDUSTRY-ACADEMIC COOPERATION FOUNDATION
- 当前专利权人: INJE UNIVERSITY INDUSTRY-ACADEMIC COOPERATION FOUNDATION
- 当前专利权人地址: KR Gimhae-si, Gyeongsangnam-do
- 优先权: KR10-2010-0091544 20100917
- 国际申请: PCT/KR2011/006830 WO 20110916
- 主分类号: H05H1/24
- IPC分类号: H05H1/24
摘要:
Provided is a plasma treatment apparatus using a leakage current transformer, the apparatus, including: a chamber which provides a closed space in which plasma is formed, and receives a treated sample in an inner part thereof; an exhaust unit for forming the inner part of the chamber in a vacuum state; plasma generation electrodes fixed in the chamber, positive and negative poles of which are installed to be opposed to each other; a variable power supply which is installed in an outer part of the chamber and supplies a power source to the plasma generation electrodes; and a leakage current transformer which is installed between the variable power supply and the plasma generation electrodes and adjusts voltage and current applied to the plasma generation electrodes.
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