发明申请
US20130182167A1 METHOD AND DEVICE FOR DETECTING AN OBJECT IN A SUBSTRATE 有权
用于检测基板中的对象的方法和装置

METHOD AND DEVICE FOR DETECTING AN OBJECT IN A SUBSTRATE
摘要:
A method and device for detecting an object in a substrate is disclosed. The device has a sensor unit having a sensor element and at least one further sensor element, a control and evaluation unit, and a display unit. The method for detecting an object in a substrate includes simultaneous reception of a receive signal and at least one further receive signal and simultaneous calculation of a depth cross-sectional image from the receive signal and at least one further depth cross-sectional image from the at least one further receive signal by the control and evaluation unit.
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