发明申请
- 专利标题： METHOD OF FORMING INKJET NOZZLE CHAMBER
- 专利标题（中）： 形成喷嘴喷嘴的方法
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申请号： US13750968申请日： 2013-01-25
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公开(公告)号： US20130193104A1公开(公告)日： 2013-08-01
- 发明人: Gregory John McAvoy , Kia Silverbrook
- 申请人： Gregory John McAvoy , Kia Silverbrook
- 申请人地址： IE Dublin
- 专利权人： ZAMTEC LIMITED
- 当前专利权人： ZAMTEC LIMITED
- 当前专利权人地址： IE Dublin
- 主分类号： B41J2/16
- IPC分类号： B41J2/16
摘要：
A method of forming an inkjet nozzle chamber includes the steps of: (a) depositing a layer of chamber material onto a substrate, the layer of chamber material defining a depth of the nozzle chamber; (b) removing a predetermined region of the layer of chamber material to define sidewalls of the nozzle chamber and an internal volume of the nozzle chamber; (c) depositing a sacrificial material to fill the internal volume contained within the sidewalls; (d) depositing a roof layer onto the sacrificial material and the sidewalls; (e) etching the roof layer to define a nozzle opening therein; and (f) removing the sacrificial material contained in the internal volume so as to form the nozzle chamber.
公开/授权文献
- US08608286B2 Method of forming inkjet nozzle chamber 公开/授权日：2013-12-17
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