发明申请
US20130193398A1 MEMORY ARRAYS AND METHODS OF FORMING SAME 有权
记忆阵列及其形成方法

MEMORY ARRAYS AND METHODS OF FORMING SAME
摘要:
Memory arrays and methods of forming the same are provided. One example method of forming a memory array can include forming a first conductive material having a looped feature using a self-aligning multiple patterning technique, and forming a first sealing material over the looped feature. A first chop mask material is formed over the first sealing material. The looped feature and the first sealing material are removed outside the first chop mask material.
公开/授权文献
信息查询
0/0