发明申请
- 专利标题: MEMORY ARRAYS AND METHODS OF FORMING SAME
- 专利标题(中): 记忆阵列及其形成方法
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申请号: US13358882申请日: 2012-01-26
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公开(公告)号: US20130193398A1公开(公告)日: 2013-08-01
- 发明人: Fabio Pellizzer , Antonino Rigano
- 申请人: Fabio Pellizzer , Antonino Rigano
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 主分类号: H01L47/00
- IPC分类号: H01L47/00 ; H01L21/02
摘要:
Memory arrays and methods of forming the same are provided. One example method of forming a memory array can include forming a first conductive material having a looped feature using a self-aligning multiple patterning technique, and forming a first sealing material over the looped feature. A first chop mask material is formed over the first sealing material. The looped feature and the first sealing material are removed outside the first chop mask material.
公开/授权文献
- US08728940B2 Memory arrays and methods of forming same 公开/授权日:2014-05-20
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