发明申请
- 专利标题： TRICHLOROSILANE VAPORIZATION SYSTEM
- 专利标题（中）： 三氯硅烷沸腾系统
-
申请号： US13828725申请日： 2013-03-14
-
公开(公告)号： US20130195432A1公开(公告)日： 2013-08-01
- 发明人: Abarajith Hari , Zhihui Gu , Satish Bhusarapu , Timothy Truong , Puneet Gupta
- 申请人： MEMC ELECTRONIC MATERIALS, INC.
- 申请人地址： US MO St. Peters
- 专利权人： MEMC ELECTRONIC MATERIALS, INC.
- 当前专利权人： MEMC ELECTRONIC MATERIALS, INC.
- 当前专利权人地址： US MO St. Peters
- 主分类号： F22B1/28
- IPC分类号： F22B1/28
摘要：
A heat exchanger for vaporizing a liquid and a method of using the same are disclosed. The heat exchanger includes a housing, a tube, a heater, and a plurality of non-reactive members. The tube is disposed in the interior of the housing and has an inlet and an outlet. The heater is configured to heat the tube. The plurality of non-reactive members are disposed in an interior cavity of the tube in an arrangement such that a plurality of voids are defined between the members and the tube. The arrangement also permits liquid to pass through the voids and travel from the inlet of the tube to the outlet of tube. The plurality of non-reactive members and the tube transfer heat to the liquid as the liquid passes through the plurality of voids in order to vaporize the liquid.
信息查询
