发明申请
US20130199445A1 VAPOR DEPOSITION DEVICE, VAPOR DEPOSITION METHOD, AND METHOD FOR PRODUCING ORGANIC ELECTROLUMINESCENCE DISPLAY DEVICE
审中-公开
蒸气沉积装置，蒸气沉积方法和用于生产有机电致发光显示装置的方法
- 专利标题： VAPOR DEPOSITION DEVICE, VAPOR DEPOSITION METHOD, AND METHOD FOR PRODUCING ORGANIC ELECTROLUMINESCENCE DISPLAY DEVICE
- 专利标题（中）： 蒸气沉积装置，蒸气沉积方法和用于生产有机电致发光显示装置的方法
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申请号： US13879761申请日： 2011-10-12
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公开(公告)号： US20130199445A1公开(公告)日： 2013-08-08
- 发明人: Tohru Sonoda , Shinichi Kawato , Satoshi Inoue
- 申请人： Tohru Sonoda , Shinichi Kawato , Satoshi Inoue
- 申请人地址： JP Osaka
- 专利权人： SHARP KABUSHIKI KAISHA
- 当前专利权人： SHARP KABUSHIKI KAISHA
- 当前专利权人地址： JP Osaka
- 优先权： JP2010-234625 20101019
- 国际申请： PCT/JP2011/073426 WO 20111012
- 主分类号： C23C16/04
- IPC分类号： C23C16/04
摘要：
A vapor deposition device (50) disclosed, a partition wall (26) standing between film formation regions on a film formation substrate (200), includes: a mask unit (80) including a shadow mask (81) and a vapor deposition source (85) fixed in position relative to each other; contacting means for bringing the film formation substrate (200) and the shadow mask (81) into contact with each other at the partition wall (26); and moving means for moving at least a first one of the mask unit (80) and the film formation substrate (200) relative to a second one thereof in a state in which the contact caused by the contacting means is kept.
公开/授权文献
- US3232188A Tamping machine 公开/授权日：1966-02-01
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