发明申请
- 专利标题: METHOD AND APPARATUS FOR CONTACTLESSLY ADVANCING SUBSTRATES
- 专利标题(中): 不间断地提高基板的方法和装置
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申请号: US13808392申请日: 2011-07-06
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公开(公告)号: US20130199448A1公开(公告)日: 2013-08-08
- 发明人: Ernst Hendrik August Granneman , Vladimir Kuznetsov
- 申请人: Ernst Hendrik August Granneman , Vladimir Kuznetsov
- 优先权: NL2005049 20100707
- 国际申请: PCT/NL2011/050483 WO 20110706
- 主分类号: C23C16/455
- IPC分类号: C23C16/455 ; C23C16/54 ; B65G51/02
摘要:
A method of contactlessly advancing a substrate (140), comprising: —providing a process tunnel (102), extending in a longitudinal direction and bounded by at least a first (120) and a second (134) wall; —providing first and second gas bearings (124, 134) by providing substantially laterally flowing gas alongside the first and second walls respectively; —bringing about a first longitudinal division of the process tunnel into a plurality of pressure segments (116), wherein the gas bearings (124, 34) in a pressure segment have an average gas pressure that is different from an average gas pressure of the gas bearings in an adjacent pressure segment; —providing a substrate (140) in between the first wall (120) and the second wall (130); and 1—allowing differences in average gas pressure between adjacent pressure segments (116) to drive the substrate along the longitudinal direction of the process tunnel.
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