发明申请
- 专利标题: METHOD AND APPARATUS FOR HIGH PRESSURE SENSOR DEVICE
- 专利标题(中): 高压传感器装置的方法和装置
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申请号: US13371635申请日: 2012-02-13
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公开(公告)号: US20130207207A1公开(公告)日: 2013-08-15
- 发明人: William G. McDonald , Alexander M. Arayata , Philip H. Bowles , Stephen R. Hooper
- 申请人: William G. McDonald , Alexander M. Arayata , Philip H. Bowles , Stephen R. Hooper
- 主分类号: H01L29/84
- IPC分类号: H01L29/84 ; H01L21/50
摘要:
A pressure sensor package is provided that reduces the occurrence of micro gaps between molding material and metal contacts that can store high-pressure air. The present invention provides this capability by reducing or eliminating interfaces between package molding material and metal contacts. In one embodiment, a control die is electrically coupled to a lead frame and then encapsulated in molding material, using a technique that forms a cavity over a portion of the control die. The cavity exposes contacts on the free surface of the control die that can be electrically coupled to a pressure sensor device using, for example, wire bonding techniques. In another embodiment, a region of a substrate can be encapsulated in molding material, using a technique that forms a cavity over a sub-portion of the substrate that includes contacts. A pressure sensor device can be electrically coupled to the exposed contacts.
公开/授权文献
- US08686550B2 Method and apparatus for high pressure sensor device 公开/授权日:2014-04-01
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