发明申请
- 专利标题: THIN FILM ULTRASOUND TRANSDUCER
- 专利标题(中): 薄膜超声波传感器
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申请号: US13812640申请日: 2011-07-12
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公开(公告)号: US20130208572A1公开(公告)日: 2013-08-15
- 发明人: Mareike Klee , Ruediger Mauczok , Henri Marie Joseph Boots , Nico Maris Adriaan De Wild , Biju Kumar Sreedharan Nair , Olaf Wunnicke , Willem Franke Pasveer , Dirk Van De Lagemaat , Peter Dirksen
- 申请人: Mareike Klee , Ruediger Mauczok , Henri Marie Joseph Boots , Nico Maris Adriaan De Wild , Biju Kumar Sreedharan Nair , Olaf Wunnicke , Willem Franke Pasveer , Dirk Van De Lagemaat , Peter Dirksen
- 申请人地址: NL EINDHOVEN
- 专利权人: KONINKLIJKE PHILIPS ELECTRONICS N.V.
- 当前专利权人: KONINKLIJKE PHILIPS ELECTRONICS N.V.
- 当前专利权人地址: NL EINDHOVEN
- 优先权: EP10305849.1 20100730; EP11305741.8 20110614
- 国际申请: PCT/IB2011/053096 WO 20110712
- 主分类号: B06B1/06
- IPC分类号: B06B1/06
摘要:
The present invention relates to a transducer (11) comprising—a membrane (31) configured to change shape in response to a force, the membrane (31) having a first major surface (16) and a second major surface (17),—a piezoelectric layer (18) formed over the first major surface (16) of the membrane (31), the piezoelectric layer (18) having an active portion,—first and second electrodes (19) in contact with the piezoelectric layer (18), wherein an electric field between the first and second electrodes (19) determines the mechanical movement of the piezoelectric layer (18),—support structures (40) at the second major surface (17) of the membrane (15) on adjacent sides of the active portion of the piezoelectric layer (18), at least part of the support structures (40) forming walls perpendicular, or at least not parallel, to the second major surface (17) of the membrane (31), so as to form a trench (41) of any shape underlying the active portion, so that an ultrasound transducer is obtained with a high output pressure at the support side than at the opposite side. The invention also relates to a method of forming such a transducer, and an array comprising at least one transducer of the like.
公开/授权文献
- US09440258B2 Thin film ultrasound transducer 公开/授权日:2016-09-13
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