发明申请
US20130209352A1 APPARATUS AND METHOD FOR MANUFACTURING COMPOSITE NANO PARTICLES 有权
用于制造复合纳米颗粒的装置和方法

APPARATUS AND METHOD FOR MANUFACTURING COMPOSITE NANO PARTICLES
摘要:
Disclosed are an apparatus and a method for manufacturing composite nanoparticles. The apparatus comprises: a first precursor supply unit vaporizing a first precursor and supplying it to a reaction unit; a second precursor supply unit vaporizing a second precursor and supplying it to the reaction unit; the reaction unit producing composite nanoparticles by reacting the vaporized first precursor with the vaporized second precursor; an oxygen supply line supplying an oxygen source to the reaction unit; and a collection unit collecting the composite nanoparticles produced by the reaction unit. Since gas phase synthesis occurs in different stages using the U-shaped reaction chamber, aggregation is prevented and composite nanoparticles of uniform size and high specific surface area can be produced easily.
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