Invention Application
US20130213944A1 System for Laser Direct Writing of MESA Structures Having Negatively Sloped Sidewalls
审中-公开
具有负倾斜侧壁的MESA结构的激光直接写入系统
- Patent Title: System for Laser Direct Writing of MESA Structures Having Negatively Sloped Sidewalls
- Patent Title (中): 具有负倾斜侧壁的MESA结构的激光直接写入系统
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Application No.: US13882194Application Date: 2011-10-18
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Publication No.: US20130213944A1Publication Date: 2013-08-22
- Inventor: Olivier Dellea , Pascal Fugier , Zoé Tebby
- Applicant: Olivier Dellea , Pascal Fugier , Zoé Tebby
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Priority: FR1058832 20101027
- International Application: PCT/EP2011/068168 WO 20111018
- Main IPC: B23K26/02
- IPC: B23K26/02

Abstract:
In the field of photolithography systems designed to produce electronic components using the technique known as “lift-off” on a plane substrate comprising one or more plane photosensitive layers, a system uses a laser direct-write technique. It comprises optical or mechanical means configured such that the useful part of the optical beam is inclined on the plane of the photosensitive layers in order to create profiles with an inverted slope within said layers, the useful part of the optical beam being the part of the optical beam which effectively contributes to creating said profiles. In one preferred embodiment, the system comprises means for partial shuttering of the optical beam situated in the neighborhood of the focusing optics.
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