Invention Application
US20130213944A1 System for Laser Direct Writing of MESA Structures Having Negatively Sloped Sidewalls 审中-公开
具有负倾斜侧壁的MESA结构的激光直接写入系统

System for Laser Direct Writing of MESA Structures Having Negatively Sloped Sidewalls
Abstract:
In the field of photolithography systems designed to produce electronic components using the technique known as “lift-off” on a plane substrate comprising one or more plane photosensitive layers, a system uses a laser direct-write technique. It comprises optical or mechanical means configured such that the useful part of the optical beam is inclined on the plane of the photosensitive layers in order to create profiles with an inverted slope within said layers, the useful part of the optical beam being the part of the optical beam which effectively contributes to creating said profiles. In one preferred embodiment, the system comprises means for partial shuttering of the optical beam situated in the neighborhood of the focusing optics.
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