Invention Application
US20130214357A1 NON-PLANAR MOSFET STRUCTURES WITH ASYMMETRIC RECESSED SOURCE DRAINS AND METHODS FOR MAKING THE SAME
有权
具有不对称吸收源排水的非平面MOSFET结构及其制造方法
- Patent Title: NON-PLANAR MOSFET STRUCTURES WITH ASYMMETRIC RECESSED SOURCE DRAINS AND METHODS FOR MAKING THE SAME
- Patent Title (中): 具有不对称吸收源排水的非平面MOSFET结构及其制造方法
-
Application No.: US13398339Application Date: 2012-02-16
-
Publication No.: US20130214357A1Publication Date: 2013-08-22
- Inventor: Josephine B. Chang , Paul Chang , Michael A. Guillorn , Chung-hsun Lin , Jeffrey W. Sleight
- Applicant: Josephine B. Chang , Paul Chang , Michael A. Guillorn , Chung-hsun Lin , Jeffrey W. Sleight
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L21/336

Abstract:
Non-planar Metal Oxide Field Effect Transistors (MOSFETs) and methods for making non-planar MOSFETs with asymmetric, recessed source and drains having improved extrinsic resistance and fringing capacitance. The methods include a fin-last, replacement gate process to form the non-planar MOSFETs and employ a retrograde metal lift-off process to form the asymmetric source/drain recesses. The lift-off process creates one recess which is off-set from a gate structure while a second recess is aligned with the structure. Thus, source/drain asymmetry is achieved by the physical structure of the source/drains, and not merely by ion implantation. The resulting non-planar device has a first channel of a fin contacting a substantially undoped area on the drain side and a doped area on the source side, thus the first channel is asymmetric. A channel on atop surface of a fin is symmetric because it contacts doped areas on both the drain and source sides.
Public/Granted literature
- US08637371B2 Non-planar MOSFET structures with asymmetric recessed source drains and methods for making the same Public/Granted day:2014-01-28
Information query
IPC分类: