发明申请
US20130224655A1 POSITIVE-TYPE PHOTORESIST COMPOSITION 有权
正极型光电组合物

  • 专利标题: POSITIVE-TYPE PHOTORESIST COMPOSITION
  • 专利标题(中): 正极型光电组合物
  • 申请号: US13884807
    申请日: 2011-10-25
  • 公开(公告)号: US20130224655A1
    公开(公告)日: 2013-08-29
  • 发明人: Takakazu KageNorifumi Imaizumi
  • 申请人: Takakazu KageNorifumi Imaizumi
  • 申请人地址: JP Tokyo
  • 专利权人: DIC CORPORATION
  • 当前专利权人: DIC CORPORATION
  • 当前专利权人地址: JP Tokyo
  • 优先权: JP2010-251760 20101110
  • 国际申请: PCT/JP2011/074489 WO 20111025
  • 主分类号: G03F7/004
  • IPC分类号: G03F7/004
POSITIVE-TYPE PHOTORESIST COMPOSITION
摘要:
Provided is a positive photoresist composition containing a cresol novolac resin (A) manufactured using m-cresol, p-cresol, and formaldehyde as essential raw materials and a novolac phenolic resin (B) manufactured using o-cresol, resorcinol, and formaldehyde as essential raw materials. This positive photoresist composition has high sensitivity and high heat resistance at the same time, which have so far been difficult to achieve at the same time, at a higher level and is suitable for use as a resist in, for example, the manufacture of semiconductor devices such as ICs and LSIs, which have required formation of finer patterns with the increasing packing density in recent years, the manufacture of displays such as LCDs, and the manufacture of printing plates.
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