发明申请
- 专利标题: METHOD OF FORMING A CONTACT AND METHOD OF MANUFACTURING A PHASE CHANGE MEMORY DEVICE USING THE SAME
- 专利标题(中): 形成接触的方法和使用该方法制造相变存储器件的方法
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申请号: US13613277申请日: 2012-09-13
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公开(公告)号: US20130224929A1公开(公告)日: 2013-08-29
- 发明人: SEUNG-PIL KO , Eun-Jung Kim , Yong-Jun Kim
- 申请人: SEUNG-PIL KO , Eun-Jung Kim , Yong-Jun Kim
- 申请人地址: KR SUWON-SI
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR SUWON-SI
- 优先权: KR10-2012-0019752 20120227
- 主分类号: H01L45/00
- IPC分类号: H01L45/00
摘要:
Provided are a method of forming a contact and a method of manufacturing a phase change memory device using the same. The method of forming a contact includes forming on a substrate an insulating layer pattern having first sidewalls extending in a first direction and second sidewalls extending in a second direction perpendicular to the first direction and which together delimit contact holes, forming semiconductor patterns in lower parts of the contact holes, forming isolation spacers on the semiconductor pattern and side surfaces of the first sidewalls to expose portions of the semiconductor patterns, and etching the exposed portions of the semiconductor patterns using the isolation spacers as a mask to divide the semiconductor patterns into a plurality of finer semiconductor patterns.
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