发明申请
- 专利标题: SURFACE-EMITTING LASER ARRAY, OPTICAL SCANNING DEVICE, AND IMAGE FORMING DEVICE
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申请号: US13866445申请日: 2013-04-19
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公开(公告)号: US20130230070A1公开(公告)日: 2013-09-05
- 发明人: Shunichi Sato , Akihiro Itoh , Satoru Sugawara , Hiroyoshi Shouji
- 申请人: Shunichi Sato , Akihiro Itoh , Satoru Sugawara , Hiroyoshi Shouji
- 申请人地址: JP Tokyo
- 专利权人: RICOH COMPANY, LTD.
- 当前专利权人: RICOH COMPANY, LTD.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2006-226561 20060823; JP2006-226562 20060823; JP2007-134856 20070522
- 主分类号: H01S5/18
- IPC分类号: H01S5/18
摘要:
A surface-emitting laser array includes a plurality of surface-emitting laser elements. Each surface-emitting laser element includes a first reflection layer formed on a substrate, a resonator formed in contact with the first reflection layer and containing an active layer, and a second reflection layer formed over the first reflection layer and in contact with the resonator. The second reflection layer contains a selective oxidation layer. The first reflection layer contains on the active layer side at least a low refractive index layer having an oxidation rate equivalent to or larger than an oxidation rate of a selective oxidation layer contained in the second reflection layer. The resonator is made of an AlGaInPAs base material containing at least In. A bottom of a mesa structure is located under the selective oxidation layer and over the first reflection layer.
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