发明申请
US20130233705A1 TITANIUM DIBORIDE TARGET 有权
钛白勺目标

  • 专利标题: TITANIUM DIBORIDE TARGET
  • 专利标题(中): 钛白勺目标
  • 申请号: US13696117
    申请日: 2011-05-02
  • 公开(公告)号: US20130233705A1
    公开(公告)日: 2013-09-12
  • 发明人: Michael O'Sullivan
  • 申请人: Michael O'Sullivan
  • 申请人地址: AT REUTTE
  • 专利权人: PLANSEE SE
  • 当前专利权人: PLANSEE SE
  • 当前专利权人地址: AT REUTTE
  • 优先权: ATGM288/2010 20100504
  • 国际申请: PCT/AT2011/000209 WO 20110502
  • 主分类号: C23C14/06
  • IPC分类号: C23C14/06
TITANIUM DIBORIDE TARGET
摘要:
A titanium diboride target contains fractions of one or more metals from the group including iron, nickel, cobalt and chromium as well as carbon. The mean grain size of TiB2 grains is between 1 μm and 20 μm, the carbon content is in a range of 0.1 to 5% by weight and the total content of Fe, Ni, Co and/or Cr is in a range of 500 to 3,000 μg/g. The carbon is distributed in free form at the grain boundaries of the TiB2 grains in such a way that mean distances between individual carbon particles are less than 20 μm. The porosity is less than 5% by volume.
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