发明申请
- 专利标题： COOLING AND/OR LUBRICATING FLUIDS FOR WAFER PRODUCTION
- 专利标题（中）： 冷却和/或润滑用于生产水的流体
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申请号： US13751995申请日： 2013-01-28
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公开(公告)号： US20130236386A1公开(公告)日： 2013-09-12
- 发明人: Hans-Peter Seelmann-Eggebert , Sophie Maitro-Vogel , Eva-Maria Reis-Walther , Joachim Bentele , Lena Alveborn-Jansson
- 申请人： Hans-Peter Seelmann-Eggebert , Sophie Maitro-Vogel , Eva-Maria Reis-Walther , Joachim Bentele , Lena Alveborn-Jansson
- 主分类号： B28D5/00
- IPC分类号： B28D5/00
摘要：
The invention relates to the use of modified polyglycols for production of cooling and/or lubricating fluids, to novel cooling and/or lubricating fluids, to the use of the cooling and/or lubricating fluids in the removal of material, especially in the cutting of wafers, and to wafers produced with the aid of the cutting fluid.
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