发明申请
- 专利标题: UNCOOLED INFRARED IMAGING DEVICE
- 专利标题(中): 未经处理的红外成像装置
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申请号: US13728009申请日: 2012-12-27
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公开(公告)号: US20130248714A1公开(公告)日: 2013-09-26
- 发明人: Hiroto Honda , Kazuhiro Suzuki , Hideyuki Funaki , Masaki Atsuta , Keita Sasaki , Koichi Ishii , Honam Kwon
- 申请人: Hiroto Honda , Kazuhiro Suzuki , Hideyuki Funaki , Masaki Atsuta , Keita Sasaki , Koichi Ishii , Honam Kwon
- 优先权: JP2012-068158 20120323
- 主分类号: H01L27/146
- IPC分类号: H01L27/146 ; G01J5/20
摘要:
An uncooled infrared imaging device according to an embodiment includes: reference pixels formed on a semiconductor substrate and arranged in at least one row; and infrared detection pixels arranged in the remaining rows and detecting incident infrared rays. Each of the reference pixels includes a first cell located above a first concave portion. The first cell includes a first thermoelectric conversion unit having a first infrared absorption film; and a first thermoelectric conversion element. Each of the infrared detection pixels includes a second cell located above a second concave portion, and having a larger area than the first cell. The second cell includes: a second thermoelectric converting unit located above the second concave portion; and first and second supporting structure units supporting the second thermoelectric converting unit above the second concave portion. The second thermoelectric converting unit includes: a second infrared absorption film; and a second thermoelectric conversion element.
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