发明申请
- 专利标题: FLIP EDGE SHADOW FRAME
- 专利标题(中): 卷边边框
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申请号: US13569064申请日: 2012-08-07
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公开(公告)号: US20130263782A1公开(公告)日: 2013-10-10
- 发明人: QUNHUA WANG , Soo Young Choi , Robin L. Tiner , John M. White , Gaku Furuta , Beom Soo Park
- 申请人: QUNHUA WANG , Soo Young Choi , Robin L. Tiner , John M. White , Gaku Furuta , Beom Soo Park
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 主分类号: C23C16/04
- IPC分类号: C23C16/04
摘要:
Device for processing a substrate are described herein. An apparatus for controlling deposition on a substrate can include a chamber comprising a shadow frame support, a substrate support comprising a substrate supporting surface, a shadow frame with a shadow frame body including a first support surface, a second support surface opposite the first surface, and a detachable lip connected with the shadow frame body. The detachable lip can include a support connection, a first lip surface facing the substrate, a second lip surface opposite the first lip surface, a first edge positioned over the first support surface, and a second edge opposite the first edge to contact the substrate.
公开/授权文献
- US10676817B2 Flip edge shadow frame 公开/授权日:2020-06-09