Invention Application
- Patent Title: SPOT SIZE CONVERTERS AND METHODS OF MANUFACTURING THE SAME
- Patent Title (中): SPOT SIZE转换器及其制造方法
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Application No.: US13618353Application Date: 2012-09-14
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Publication No.: US20130266263A1Publication Date: 2013-10-10
- Inventor: Oh Kee KWON , Chul-Wook LEE , Dong-Hun LEE , Young Ahn LEEM , Young-Tak HAN , Yongsoon BAEK , Yun C. CHUNG
- Applicant: Oh Kee KWON , Chul-Wook LEE , Dong-Hun LEE , Young Ahn LEEM , Young-Tak HAN , Yongsoon BAEK , Yun C. CHUNG
- Applicant Address: KR Daejeon
- Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee Address: KR Daejeon
- Priority: KR10-2012-0035014 20120404
- Main IPC: G02B6/26
- IPC: G02B6/26 ; H01P11/00

Abstract:
Provided are a spot size converter and a method of manufacturing the spot size converter. The method includes stacking a lower clad layer, a core layer, and a first upper clad layer on a substrate, tapering the first upper clad layer and the core layer in a first direction on a side of the substrate, forming a waveguide layer on the first upper clad layer and the lower clad layer, and etching the waveguide layer, the first upper clad layer, the core layer, and the lower clad layer such that the waveguide layer is wider than a tapered portion of the core layer on the side of the substrate and has the same width as that of the core layer on another side of the substrate.
Public/Granted literature
- US09036969B2 Spot size converters and methods of manufacturing the same Public/Granted day:2015-05-19
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