发明申请
- 专利标题: PACKAGE STRUCTURE AND PACKAGING METHOD
- 专利标题(中): 包装结构和包装方法
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申请号: US13491024申请日: 2012-06-07
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公开(公告)号: US20130266774A1公开(公告)日: 2013-10-10
- 发明人: Pinyen Lin , Yu-Fu Kang
- 申请人: Pinyen Lin , Yu-Fu Kang
- 申请人地址: TW Yangmei City
- 专利权人: TOUCH MICRO-SYSTEM TECHNOLOGY CORP.
- 当前专利权人: TOUCH MICRO-SYSTEM TECHNOLOGY CORP.
- 当前专利权人地址: TW Yangmei City
- 优先权: TW101112600 20120410
- 主分类号: B32B3/08
- IPC分类号: B32B3/08 ; C09J5/02
摘要:
A package structure and a packaging method for manufacturing the package structure are provided. The package structure comprises a cover wafer, a device wafer and a bonding material. The cover wafer has an optical element, and a surface of the cover wafer is defined with a height difference that is greater than 20 micrometers. The bonding material has a width and continuously surrounds the optical device, and is disposed between the cover wafer and the device wafer, in which the width is between 10 micrometers and 150 micrometers. The bonding material hermetically bonds the cover wafer and the device wafer to make a leakage rate of the package structure less than 5e−8 atm-cc/sec.