发明申请
- 专利标题： GRAPHENE PRESSURE SENSORS
- 专利标题（中）： 石墨压力传感器
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申请号： US13445029申请日： 2012-04-12
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公开(公告)号： US20130270511A1公开(公告)日： 2013-10-17
- 发明人: Jin Cai , Yanqing Wu , Wenjuan Zhu
- 申请人： Jin Cai , Yanqing Wu , Wenjuan Zhu
- 申请人地址： US NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： US NY Armonk
- 主分类号： H01L29/06
- IPC分类号： H01L29/06 ; H01L21/02 ; B82Y40/00
摘要：
Semiconductor nano pressure sensor devices having graphene membrane suspended over cavities formed in a semiconductor substrate. A suspended graphene membrane serves as an active electro-mechanical membrane for sensing pressure, which can be made very thin, from about one atomic layer to about 10 atomic layers in thickness, to improve the sensitivity and reliability of a semiconductor pressure sensor device.
公开/授权文献
- US08901680B2 Graphene pressure sensors 公开/授权日：2014-12-02
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