Invention Application
US20130271810A1 ILLUMINATION DEVICE, AND MICROSCOPE APPARATUS INCLUDING THE ILLUMINATION DEVICE 审中-公开
照明装置和包括照明装置的显微镜装置

ILLUMINATION DEVICE, AND MICROSCOPE APPARATUS INCLUDING THE ILLUMINATION DEVICE
Abstract:
An illumination device includes a phase-modulation type spatial light modulator that is arranged at a position optically conjugate to a pupil position of an illumination lens between a light source and the illumination lens for irradiating light emitted from the light source on a sample, and a pupil projecting optics system for projecting at least one area within the pupil of the illumination lens onto a plurality of different areas of the spatial light modulator.
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