发明申请
- 专利标题: NON-PLANAR III-N TRANSISTOR
- 专利标题(中): 非平面III-N晶体管
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申请号: US13976837申请日: 2011-12-19
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公开(公告)号: US20130277683A1公开(公告)日: 2013-10-24
- 发明人: Han Wui Then , Robert Chau , Benjamin Chu-Kung , Gilbert Dewey , Jack Kavalieros , Matthew Metz , Niloy Mukherjee , Ravi Pillarisetty , Marko Radosavljevic
- 申请人: Han Wui Then , Robert Chau , Benjamin Chu-Kung , Gilbert Dewey , Jack Kavalieros , Matthew Metz , Niloy Mukherjee , Ravi Pillarisetty , Marko Radosavljevic
- 国际申请: PCT/US11/65922 WO 20111219
- 主分类号: H01L29/778
- IPC分类号: H01L29/778 ; H01L29/66
摘要:
Transistors for high voltage and high frequency operation. A non-planar, polar crystalline semiconductor body having a top surface disposed between first and second opposite sidewalls includes a channel region with a first crystalline semiconductor layer disposed over the first and second sidewalls. The first crystalline semiconductor layer is to provide a two dimensional electron gas (2DEG) within the channel region. A gate structure is disposed over the first crystalline semiconductor layer along at least the second sidewall to modulate the 2DEG. First and second sidewalls of the non-planar polar crystalline semiconductor body may have differing polarity, with the channel proximate to a first of the sidewalls. The gate structure may be along a second of the sidewalls to gate a back barrier. The polar crystalline semiconductor body may be a group III-nitride formed on a silicon substrate with the (10 10) plane on a (110) plane of the silicon.
公开/授权文献
- US09461160B2 Non-planar III-N transistor 公开/授权日:2016-10-04
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