发明申请
- 专利标题: SCANNING ELECTRON MICROSCOPE
- 专利标题(中): 扫描电子显微镜
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申请号: US13994811申请日: 2011-11-02
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公开(公告)号: US20130284923A1公开(公告)日: 2013-10-31
- 发明人: Haruhiko Hatano , Hiroyuki Suzuki , Yoshihiko Nakayama
- 申请人: Haruhiko Hatano , Hiroyuki Suzuki , Yoshihiko Nakayama
- 申请人地址: JP Tokyo
- 专利权人: HITACHI HIGH-TECHNOLOGIES CORPORATION
- 当前专利权人: HITACHI HIGH-TECHNOLOGIES CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2011-005392 20110114
- 国际申请: PCT/JP2011/006130 WO 20111102
- 主分类号: H01J37/18
- IPC分类号: H01J37/18
摘要:
With a scanning electron microscope (SEM) adopting a commonly available exhaust system such as a turbo-molecular pump, an ion pump, or a rotary pump, and so forth, there is realized an apparatus capable of safely executing observation, or adsorption of a target substance that is high in rarity. Further, there is realized a safe SEM low in the risk of an electrical discharge by providing the apparatus with a probe, a means for replacing an atmosphere in a specimen chamber, with a predetermined gas, and a means for forming an image by detection of an ion current, and detection of an absorption current. Further, there is provided a means for controlling the polarity of a voltage applied to the probe. Still further, there is provided a control means for controlling a value of the voltage applied to the probe according to a degree of vacuum.
公开/授权文献
- US08766184B2 Scanning electron microscope 公开/授权日:2014-07-01