发明申请
- 专利标题: INTERCONNECT STRUCTURE AND METHOD FOR PRODUCING SAME
- 专利标题(中): 互连结构及其生产方法
-
申请号: US13989245申请日: 2011-11-24
-
公开(公告)号: US20130303002A1公开(公告)日: 2013-11-14
- 发明人: Gerrit Oosterhuis , Herman Hendrikus Maalderink , Andries Rijfers , René Jos Houben , Clemens Maria Bernardus van der Zon , Leonardus Antonius Maria Brouwers
- 申请人: Gerrit Oosterhuis , Herman Hendrikus Maalderink , Andries Rijfers , René Jos Houben , Clemens Maria Bernardus van der Zon , Leonardus Antonius Maria Brouwers
- 申请人地址: NL Delft
- 专利权人: Nederlandse Organisatie voor toegepastnatuuwetenschappelijk onderzoek TNO
- 当前专利权人: Nederlandse Organisatie voor toegepastnatuuwetenschappelijk onderzoek TNO
- 当前专利权人地址: NL Delft
- 优先权: EP10192458.7 20101124
- 国际申请: PCT/NL11/50800 WO 20111124
- 主分类号: H01R12/71
- IPC分类号: H01R12/71 ; H01R43/26
摘要:
There is provided a three-dimensional interconnect structure for micro-electronic devices and a method for producing such an interconnect structure. The method comprises a step wherein a backbone structure is manufactured using an additive layer-wise manufacturing process. The backbone structure comprises a three-dimensional cladding skeleton and a support structure. The cladding skeleton comprises layered freeform skeleton parts that will form the electric interconnections between the electric contacts of the interconnect structure after a conductive material is applied on the backbone structure. The support structure supports the layered freeform skeleton parts. Parts of the support structure may be removed to isolate and/or expose the electric interconnections. The cladding skeleton can be embedded by an insulating material for providing a further support.
信息查询