发明申请
US20130303002A1 INTERCONNECT STRUCTURE AND METHOD FOR PRODUCING SAME 审中-公开
互连结构及其生产方法

INTERCONNECT STRUCTURE AND METHOD FOR PRODUCING SAME
摘要:
There is provided a three-dimensional interconnect structure for micro-electronic devices and a method for producing such an interconnect structure. The method comprises a step wherein a backbone structure is manufactured using an additive layer-wise manufacturing process. The backbone structure comprises a three-dimensional cladding skeleton and a support structure. The cladding skeleton comprises layered freeform skeleton parts that will form the electric interconnections between the electric contacts of the interconnect structure after a conductive material is applied on the backbone structure. The support structure supports the layered freeform skeleton parts. Parts of the support structure may be removed to isolate and/or expose the electric interconnections. The cladding skeleton can be embedded by an insulating material for providing a further support.
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