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US20130307557A1 APPARATUS AND METHOD FOR INSPECTING SHORT CIRCUIT DEFECTS 有权
检查短路电路缺陷的装置和方法

APPARATUS AND METHOD FOR INSPECTING SHORT CIRCUIT DEFECTS
Abstract:
A method of inspecting a short circuit defect between first wires extending in a first direction and a second direction intersecting the first direction and second wires extending in the first or second direction, the method including inspecting a short circuit defect between the first and second wires by using a potential difference monitored only in the second wires.
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