Invention Application
US20130314093A1 METHOD AND SYSTEM EMPLOYING A SOLUTION CONTACT FOR MEASUREMENT
审中-公开
使用解决方案联系人进行测量的方法和系统
- Patent Title: METHOD AND SYSTEM EMPLOYING A SOLUTION CONTACT FOR MEASUREMENT
- Patent Title (中): 使用解决方案联系人进行测量的方法和系统
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Application No.: US13900177Application Date: 2013-05-22
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Publication No.: US20130314093A1Publication Date: 2013-11-28
- Inventor: Long Cheng , Markus Gloeckler
- Applicant: First Solar, Inc.
- Applicant Address: US OH Perrysburg
- Assignee: First Solar, Inc.
- Current Assignee: First Solar, Inc.
- Current Assignee Address: US OH Perrysburg
- Main IPC: G01N17/02
- IPC: G01N17/02
Abstract:
An inline metrology method and system using an electrolytic cell for measuring electrical characteristics of a semiconductor device, such as a photovoltaic device, during manufacture.
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