Invention Application
US20130316095A1 RETAINING DEVICE FOR SUBSTRATES AND METHOD FOR COATING A SUBSTRATE 审中-公开
用于衬底的保持装置和用于涂覆衬底的方法

RETAINING DEVICE FOR SUBSTRATES AND METHOD FOR COATING A SUBSTRATE
Abstract:
The invention relates to a retaining device for substrates to be coated, which device comprises a contact surface for the substrate to be coated. The retaining device is for example configured as a plate on which the substrate rests and which has one or more apertures, e.g. drilled holes, grooves etc. has, through which a pressure gradient can be set between the face of the substrate and the opposite face of the retaining device. In this way a temporary fixing of the substrate by suction onto the retaining device is possible. The invention also relates to a method for coating a substrate which uses the retaining device according to the invention.
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