Invention Application
US20130316095A1 RETAINING DEVICE FOR SUBSTRATES AND METHOD FOR COATING A SUBSTRATE
审中-公开
用于衬底的保持装置和用于涂覆衬底的方法
- Patent Title: RETAINING DEVICE FOR SUBSTRATES AND METHOD FOR COATING A SUBSTRATE
- Patent Title (中): 用于衬底的保持装置和用于涂覆衬底的方法
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Application No.: US13993176Application Date: 2011-12-19
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Publication No.: US20130316095A1Publication Date: 2013-11-28
- Inventor: Stefan Reber , Norbert Schillinger , Martin Arnold , David Pocza
- Applicant: Stefan Reber , Norbert Schillinger , Martin Arnold , David Pocza
- Applicant Address: DE Munich
- Assignee: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
- Current Assignee: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
- Current Assignee Address: DE Munich
- Priority: DE102010055675.0 20101222
- International Application: PCT/EP2011/006419 WO 20111219
- Main IPC: C23C16/458
- IPC: C23C16/458

Abstract:
The invention relates to a retaining device for substrates to be coated, which device comprises a contact surface for the substrate to be coated. The retaining device is for example configured as a plate on which the substrate rests and which has one or more apertures, e.g. drilled holes, grooves etc. has, through which a pressure gradient can be set between the face of the substrate and the opposite face of the retaining device. In this way a temporary fixing of the substrate by suction onto the retaining device is possible. The invention also relates to a method for coating a substrate which uses the retaining device according to the invention.
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