Invention Application
US20130323998A1 DROPLET DISCHARGE DEVICE 有权
滴液放电装置

DROPLET DISCHARGE DEVICE
Abstract:
A pattern film formation method includes: discharging liquid from at least one first discharge head toward a first pattern film formation region on a substrate; and discharging liquid from a plurality of second discharge heads toward a second pattern film formation region that is narrower than the first pattern film formation region. A number of the second discharge heads is greater than a number of the at least one first discharge head.
Public/Granted literature
Information query
Patent Agency Ranking
0/0