发明申请
- 专利标题: MICROFABRICATED MAGNETIC DEVICES AND ASSOCIATED METHODS
- 专利标题(中): 微晶磁性器件及相关方法
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申请号: US13911900申请日: 2013-06-06
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公开(公告)号: US20130328165A1公开(公告)日: 2013-12-12
- 发明人: Daniel V. Harburg , Charles R. Sullivan , Christopher G. Levey , Jason T. Stauth
- 申请人: The Trustees of Dartmouth College
- 主分类号: H01L49/02
- IPC分类号: H01L49/02 ; H01F5/00
摘要:
A magnetic device includes a semiconductor wafer, a spiral winding, and a magnetic core. The spiral winding forms a plurality of turns and is disposed in a channel of the semiconductor wafer. The magnetic core is disposed at least partially in the channel of the semiconductor wafer and at least partially surrounds the plurality of turns. A width of the spiral winding optionally varies such that a respective width of an edge turn is smaller than a respective width of a middle turn. The channel is formed, for example, by a method including (1) patterning a resist layer on the semiconductor wafer using a mask including angularly extending compensation features, and (2) anistropically etching the semiconductor wafer to form the channel.
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