发明申请
US20130328165A1 MICROFABRICATED MAGNETIC DEVICES AND ASSOCIATED METHODS 审中-公开
微晶磁性器件及相关方法

MICROFABRICATED MAGNETIC DEVICES AND ASSOCIATED METHODS
摘要:
A magnetic device includes a semiconductor wafer, a spiral winding, and a magnetic core. The spiral winding forms a plurality of turns and is disposed in a channel of the semiconductor wafer. The magnetic core is disposed at least partially in the channel of the semiconductor wafer and at least partially surrounds the plurality of turns. A width of the spiral winding optionally varies such that a respective width of an edge turn is smaller than a respective width of a middle turn. The channel is formed, for example, by a method including (1) patterning a resist layer on the semiconductor wafer using a mask including angularly extending compensation features, and (2) anistropically etching the semiconductor wafer to form the channel.
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