Invention Application
US20130328306A1 JOINT MEMBER, JOINT, SUBSTRATE PROCESSING APPARATUS AND LIMIT MEMBER
审中-公开
接头成员，接头，基板加工设备和限制成员
- Patent Title: JOINT MEMBER, JOINT, SUBSTRATE PROCESSING APPARATUS AND LIMIT MEMBER
- Patent Title (中): 接头成员，接头，基板加工设备和限制成员
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Application No.: US13911809Application Date: 2013-06-06
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Publication No.: US20130328306A1Publication Date: 2013-12-12
- Inventor: Izumi SATO , Shusuke KONNO , Tomoyuki NAGATA
- Applicant: TOKYO ELECTRON LIMITED
- Priority: JP2012-130202 20120607
- Main IPC: F16L49/06
- IPC: F16L49/06
Abstract:
A joint member that includes a cylindrical sleeve member having a first outer diameter portion having a first outer diameter and a second outer diameter portion having a second outer diameter smaller than the first outer diameter. The joint member further includes a cylindrical nut member having an inner peripheral surface on which a first thread is formed and a bottom in which an opening is formed. The joint member further includes a limit member fixed to an outer periphery portion of the second outer diameter portion inserted into the opening and in contact with an outer surface of the bottom of the cylindrical nut member.
Information query
