发明申请
US20130330835A1 DEVICES AND METHODS FOR GRAVIMETRIC SENSING IN LIQUID ENVIRONMENTS
有权
用于液体环境中的灰度感测的装置和方法
- 专利标题: DEVICES AND METHODS FOR GRAVIMETRIC SENSING IN LIQUID ENVIRONMENTS
- 专利标题(中): 用于液体环境中的灰度感测的装置和方法
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申请号: US13882611申请日: 2011-11-01
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公开(公告)号: US20130330835A1公开(公告)日: 2013-12-12
- 发明人: Chiara Zuniga , Matteo Rinaldi , Gianluca Piazza
- 申请人: Chiara Zuniga , Matteo Rinaldi , Gianluca Piazza
- 申请人地址: US PA Philadelphia
- 专利权人: The Trustees of the University of Pennsylvania
- 当前专利权人: The Trustees of the University of Pennsylvania
- 当前专利权人地址: US PA Philadelphia
- 国际申请: PCT/US11/58712 WO 20111101
- 主分类号: G01N9/00
- IPC分类号: G01N9/00
摘要:
Devices and methods for gravimetric sensing are disclosed. A gravimetric sensor includes a piezoelectric resonator and an encapsulating layer formed on the surface of the resonator. The encapsulating layer defines a channel within the encapsulating layer on the surface of the resonator. The sensor is fabricated by forming a piezoelectric resonator, forming a sacrificial layer on a surface of the piezoelectric resonator, forming an encapsulating layer over the sacrificial layer on the resonator, and etching the sacrificial layer to remove the sacrificial layer and form a channel on the surface of the resonator. The sensor is used by supplying the liquid to the channel of the gravimetric sensor, operating the piezoelectric resonator, detecting a change in a resonant frequency of the resonator, and determining a presence of the analyte in the liquid from the change in resonant frequency of the resonator.