发明申请
- 专利标题: MICROMECHANICAL DEVICE AND METHOD FOR MANUFACTURING A MICROMECHANICAL DEVICE
- 专利标题(中): 微生物装置和制造微生物装置的方法
-
申请号: US13917044申请日: 2013-06-13
-
公开(公告)号: US20130334622A1公开(公告)日: 2013-12-19
- 发明人: Julian GONSKA , Jochen REINMUTH , Kathrin GUTSCHE
- 申请人: Julian GONSKA , Jochen REINMUTH , Kathrin GUTSCHE
- 申请人地址: DE Stuttgart
- 专利权人: Robert Bosch GmbH
- 当前专利权人: Robert Bosch GmbH
- 当前专利权人地址: DE Stuttgart
- 优先权: DE102012209973.5 20120614
- 主分类号: B81B3/00
- IPC分类号: B81B3/00 ; B81C1/00
摘要:
A micromechanical device, in particular a sensor device, and a method for manufacturing a micromechanical device are provided. The micromechanical device has a housing, the housing including a first cavity, and the housing including a second cavity that is separate from the first cavity. The micromechanical device is configured in such a way that a predetermined first gas pressure prevails in the first cavity, and a predetermined second gas pressure which is reduced compared to the first gas pressure prevails in the second cavity. A heating element is situated in the area of the second cavity. The micromechanical device has a printed conductor, the heating element being heatable with the aid of the printed conductor.
公开/授权文献
信息查询