Invention Application
- Patent Title: System With Multiple Scattered Light Collectors
- Patent Title (中): 具有多个散射光收集器的系统
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Application No.: US13953644Application Date: 2013-07-29
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Publication No.: US20130335733A1Publication Date: 2013-12-19
- Inventor: Richard E. Bills , Neil Judell , Timothy R. Tiemeyer , James P. McNiven
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-TENCOR CORPORATION
- Current Assignee: KLA-TENCOR CORPORATION
- Current Assignee Address: US CA Milpitas
- Main IPC: G01N21/956
- IPC: G01N21/956

Abstract:
A method for inspecting a surface of a workpiece for asymmetric defects, by scanning an incident beam on the surface of the workpiece to impinge thereon to create reflected light extending along a light channel axis in a front quartersphere and scattered light, the incident beam and the light channel axis defining an incident plane, collecting the scattered light at a plurality of collectors disposed above the surface at defined locations such that scatter from asymmetric defects is collectable by at least one collector, detecting collector output and generating signals in response, and processing the signals associated with each collector individually to obtain information about asymmetric defects.
Public/Granted literature
- US09103800B2 System with multiple scattered light collectors Public/Granted day:2015-08-11
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