发明申请
- 专利标题： ALUMINIUM OXIDE-BASED METALLISATION BARRIER
- 专利标题（中）： 基于氧化铝的金属筛选
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申请号： US14004074申请日： 2012-02-09
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公开(公告)号： US20130341769A1公开(公告)日： 2013-12-26
- 发明人: Ingo Koehler , Oliver Doll , Werner Stockum , Sebastian Barth
- 申请人： Ingo Koehler , Oliver Doll , Werner Stockum , Sebastian Barth
- 申请人地址： DE Darmstadt
- 专利权人： MERCK PATENT GMBH
- 当前专利权人： MERCK PATENT GMBH
- 当前专利权人地址： DE Darmstadt
- 优先权： EP11001920.5 20110308; EP11001921.3 20110308; EP11006971.3 20110826; EP11007205.5 20110906; EP11007207.1 20110906
- 国际申请： PCT/EP2012/000590 WO 20120209
- 主分类号： H01L31/0216
- IPC分类号： H01L31/0216
摘要：
The present invention relates to aluminium oxide-based passivation layers which simultaneously act as diffusion barrier for underlying wafer layers against aluminium and other metals. Furthermore, a process and suitable compositions for the production of these layers are described.