发明申请
- 专利标题： DISCHARGE SURFACE TREATMENT APPARATUS AND DISCHARGE SURFACE TREATMENT METHOD
- 专利标题（中）： 放电表面处理装置和放电表面处理方法
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申请号： US13820909申请日： 2012-06-26
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公开(公告)号： US20130344651A1公开(公告)日： 2013-12-26
- 发明人: Yoshikazu Nakano , Akihiro Goto
- 申请人： Yoshikazu Nakano , Akihiro Goto
- 申请人地址： JP Chiyoda-ku, Tokyo
- 专利权人： MITSUBISHI ELECTRIC CORPORATION
- 当前专利权人： MITSUBISHI ELECTRIC CORPORATION
- 当前专利权人地址： JP Chiyoda-ku, Tokyo
- 国际申请： PCT/JP12/66262 WO 20120626
- 主分类号： H01L21/02
- IPC分类号： H01L21/02
摘要：
A discharge surface treatment apparatus supplies an electrode material to a surface of a treatment target member by generating pulsating discharges across an inter-electrode gap to form a coating of the electrode material, and includes a switching element that turns application of a voltage from a power source to the inter-electrode gap on/off, a capacitance element that is connected to the switching element in parallel with the inter-electrode gap, an inductance element that is connected in series between both of the switching element and the capacitance element and the inter-electrode gap, and a control unit that includes a function of periodically performing on/off so that an induced electromotive force generated in the inductance element due to a change in the current of discharge generated across the inter-electrode gap can be used as a voltage that induces the next discharge
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