发明申请
- 专利标题: Semiconductor Physical Quantity Detecting Sensor
- 专利标题(中): 半导体物理量检测传感器
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申请号: US13983775申请日: 2012-01-18
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公开(公告)号: US20130346015A1公开(公告)日: 2013-12-26
- 发明人: Kiyoko Yamanaka , Heewon Jeong , Chisaki Takubo
- 申请人: Kiyoko Yamanaka , Heewon Jeong , Chisaki Takubo
- 申请人地址: JP Hitachinaka-shi
- 专利权人: Hitachi Automotive Systems, Ltd.
- 当前专利权人: Hitachi Automotive Systems, Ltd.
- 当前专利权人地址: JP Hitachinaka-shi
- 优先权: JP2011-059459 20110317
- 国际申请: PCT/JP2012/050895 WO 20120118
- 主分类号: B81B7/02
- IPC分类号: B81B7/02
摘要:
A semiconductor physical quantity detection sensor includes (1) a first electrostatic capacitance formed by the movable electrode, and a first fixed electrode formed in a first conductive layer shared with the movable electrode, (2) a second electrostatic capacitance that is formed by the movable electrode, and a second fixed electrode formed in a second conductive layer different in a height from a substrate surface from the movable electrode, and (3) an arithmetic circuit that calculates the physical quantity on the basis of a change in the first and second electrostatic capacitances generated when the physical quantity is applied. In this configuration, an electric signal from the first electrostatic capacitance, and an electric signal from the second electrostatic capacitance are input to the arithmetic circuit.
公开/授权文献
- US09511993B2 Semiconductor physical quantity detecting sensor 公开/授权日:2016-12-06
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