发明申请
US20140000377A1 SEMICONDUCTOR PACKAGE WITH AIR PRESSURE SENSOR 有权
带空气压力传感器的半导体封装

SEMICONDUCTOR PACKAGE WITH AIR PRESSURE SENSOR
摘要:
A semiconductor package having an air pressure sensor and methods to form a semiconductor package having an air pressure sensor are described. For example, a semiconductor package includes a plurality of build-up layers. A cavity is disposed in one or more of the build-up layers. An air pressure sensor is disposed in the plurality of build-up layers and includes the cavity and an electrode disposed above the cavity. Also described are various approaches to fabricating a semiconductor package having a hermetically sealed region.
公开/授权文献
信息查询
0/0