发明申请
US20140011047A1 Two-Layered Copper-Clad Laminate Material, and Method for Producing Same
审中-公开
两层铜包覆层压材料及其制造方法
- 专利标题: Two-Layered Copper-Clad Laminate Material, and Method for Producing Same
- 专利标题(中): 两层铜包覆层压材料及其制造方法
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申请号: US13983786申请日: 2012-01-25
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公开(公告)号: US20140011047A1公开(公告)日: 2014-01-09
- 发明人: Hajime Inazumi , Kazuhiko Sakaguchi , Shinichi Sasaki
- 申请人: Hajime Inazumi , Kazuhiko Sakaguchi , Shinichi Sasaki
- 申请人地址: JP Tokyo
- 专利权人: JX NIPPON MINING & METALS CORPORATION
- 当前专利权人: JX NIPPON MINING & METALS CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2011-027100 20110210
- 国际申请: PCT/JP2012/051550 WO 20120125
- 主分类号: H05K1/03
- IPC分类号: H05K1/03 ; C25D7/00 ; C23C14/20
摘要:
A two-layered copper-clad laminate material, in which one surface or both surfaces of a polyimide film having a thickness of 12.5 to 50 μm is subjected to a modification treatment by means of a glow discharge plasma treatment in an oxygen gas atmosphere, and a copper layer having a thickness of 1 to 5 μm is formed by means of sputtering or electroplating on one surface or both surfaces of the polyimide film after the modification treatment; characterized in that the integrated intensity ratio of a C1S peak at 287 to 290 eV to a C1S peak at 283 to 287 eV, obtained by analyzing the photoelectron spectroscopy (XPS) spectra of the surface of the polyimide film after the plasma treatment, is within the range of 0.03 to 0.11. The present invention aims at discovering; as a consequence of performing surface characterization by subjecting the PI film surface to XPS analysis before and after the plasma treatment, and of evaluating the dissolution properties and adhesive strength of the PI film before and after the plasma treatment; a two-layered copper-clad laminate material that is ideal to be processed during a wet PI etching step, and a production method for said two-layered copper-clad laminate material.
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