发明申请
- 专利标题： SPLIT TYPE AEROSTATIC BEARING
- 专利标题（中）： 分体式航空轴承
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申请号： US14002561申请日： 2012-02-13
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公开(公告)号： US20140016886A1公开(公告)日： 2014-01-16
- 发明人: Jinchun Li , Jie Fang , Yeqin Zheng , Hai Xia , Liwei Wu
- 申请人： Jinchun Li , Jie Fang , Yeqin Zheng , Hai Xia , Liwei Wu
- 申请人地址： CN Shanghai
- 专利权人： SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD.
- 当前专利权人： SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD.
- 当前专利权人地址： CN Shanghai
- 优先权： CN20110053278.1 20110307
- 国际申请： PCT/CN12/71057 WO 20120213
- 主分类号： F16C32/06
- IPC分类号： F16C32/06
摘要：
A split-type aerostatic bearing for supporting a moving table to move frictionlessly on a platform (4) is disclosed. The split-type aerostatic bearing includes an aerostatic bearing plate (6), air floating elements (2′a, 2′b, 2′c, 2′d) disposed on a bottom of the aerostatic bearing plate (6) and a vacuum pre-tightening structure (7) disposed on the aerostatic bearing plate (6). The vacuum pre-tightening structure (7) is coupled to the aerostatic bearing plate (6) in a split fashion. Separation of the air floating elements (2′a, 2′b, 2′c, 2′d) from the vacuum pre-tightening structure (7) prevents the aerostatic bearing plate (6) from bending under a vacuum pre-tightening force, and hence will not affect the air floating area.
公开/授权文献
- US08920031B2 Split type aerostatic bearing 公开/授权日：2014-12-30
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