发明申请
- 专利标题: Carrier Head Sweep Motor Current for In-Situ Monitoring
- 专利标题(中): 载波头扫描电机电流进行现场监控
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申请号: US13553009申请日: 2012-07-19
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公开(公告)号: US20140020830A1公开(公告)日: 2014-01-23
- 发明人: Jagan Rangarajan , Alpay Yilmaz
- 申请人: Jagan Rangarajan , Alpay Yilmaz
- 申请人地址: US CA Santa Clara
- 专利权人: APPLIED MATERIALS, INC.
- 当前专利权人: APPLIED MATERIALS, INC.
- 当前专利权人地址: US CA Santa Clara
- 主分类号: B24B29/00
- IPC分类号: B24B29/00
摘要:
A chemical mechanical polishing system includes a platen to support a polishing pad, two carrier heads configured to hold two substrates against the polishing pad at the same time, two actuators to sweep the two carrier heads laterally across the polishing pad, an in-situ polishing monitoring system including a two current sensors to sense two currents supplied to the two actuators and generate two signals, and a controller to receive the two signals and independently detect a two endpoints for the two substrates based on the two signals.
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